- Low (10 – 650 Pa) and high vacuum mode
- Resolution of 3.0 nm (30 kV) and 15.0 nm (1.0 kV) in high vacuum mode
- Resolution of 4.0 nm (30 kV, BED) in low vacuum mode
- Magnification from 5x to 300,000x
- Secondary electron image mode (SEI) and three modes of backscattered electron image (BED-T – Topographic image; BED-S – Stereo-microscopic image and BED-C – Composition image)
- Electron gun: W filament, fully automatic gun alignment
- Accelerating voltage from 0.3 to 30 kV
- Probe current from 1 pA to 1 µA
- Pixels for image acquisition: 640 x 480; 1280 x 960; 2560 x 1920 and 5120 x 3840
- Maximum specimen size: 200 mm (diameter) x 75 mm (height)
Contact: mikroskop@zag.si